An inductive plasma at SI is used for reworking of quartz which has special requirements towards
a high degree of purity. An example is cleaning material of contamination by intensive heating and
etching material. This process is mainly used for the optical industry and is either done from the
outside of the material, outside plasma, or from the inside of tube material, inside plasma. By using
the inside plasma there is a high degree of thermal density which results in cleaning and if desired
the inner surface can be re-melted.
The outside plasma mainly finds it usage in the following processes:
Due to the high temperatures and high purity the plasma can be optimal used for most quartz